Quorum Technologies


Quorum Technologies Ltd is the market leader in designing, manufacturing and distributing sample preparation and cryo-SEM products.

Sputter Coaters and SEM/TEM Carbon Coaters

Sputter coating is the standard method for preparing non-conducting or poorly conducting specimens for observation in a scanning electron microscope (SEM). We offer low-cost, rotary-pumped systems for depositing non-oxidising metals – such as gold (Au) and platinum (Pt) – and also turbomolecular-pumped models, suitable for oxidising and non-oxidising metals – such as chromium (Cr). Large chamber models are available for specimens up to 8”/200mm diameter, and all sputter coaters can be fitted with carbon evaporation attachments.

For thin film applications, the Q300T D Dual Target Sequential Sputtering System allows consecutive metal layers to be deposited, without the need to break vacuum.

The Q150T is suitable for SEM, TEM and many thin film applications. It is available in three formats – as a sputter coater, carbon coater or both – and replaces previous models K575X and K950X.

The compact rotary-pumped Q150R is a coating system suitable for SEM sputtering with noble metals and carbon coating SEM specimens for EDS and WDS. It replaces previous models K500X and K550X.

For larger specimens, the Q300R T (rotary-pumped) and Q300T T (turbo-pumped) models allow coating of a single large diameter specimen up to 8”/200mm (eg a wafer), or multiple smaller specimens over a similar diameter. Both have triple sputtering heads to ensure even metal deposition.

Glow Discharge Systems

The primary application of glow discharge is as a technique for the surface modification, or ‘wetting’, of newly-evaporated transmission electron microscopy (TEM) carbon support films.

We offer four options. The standard SC7620 ‘Mini’ Sputter Coater has a built-in glow discharge function. Alternatively, the Q150R (rotary-pumped) and Q150T/Q150GB (turbo-pumped) sputter/carbon coating systems can be fitted with an optional glow discharge attachment.

Bench-Top Vaccum Evaporators

Thermal evaporation under high vacuum is an established method of depositing thin layers of metals and carbon. Typical applications include the production of support films and specimen replicas for transmission electron microscopy (TEM) and many thin-film applications.

The K975X Turbo-Pumped Thermal Evaporator is an advanced, large chamber model and comes with a carbon rod gun and a metal filament/boat source. The entry level Q150T Turbo-Pumped Sputter/Carbon Coater (TE and TES versions) is a compact system, primarily designed for carbon deposition, but also has sputter coating capabilities. The Q150GB is a glove box version of the Q150T ES.

Recirculating Heaters and Chillers

The E4800 Series of Recirculating Heaters/Chillers are recommended for a wide range of open and closed-loop temperature control applications. For applications requiring heating only, the E3500 Thermocirculator is recommended.
RF Plasma Etchers / Plasma Reactors

RF plasma allows the low-temperature modification of a wide range of specimens and substrates. Plasma etching is generally confined to the semiconductor industry, typically for the removal of silicon layers using reactive gases, such as CF4 and for the removal of Photoresist using oxygen.

Plasma ashing refers to the controlled, low-temperature removal of organic material using oxygen or air and has applications across many areas of research and quality control. RF plasma can also be used for the surface modification of plastics and polymers, and for cleaning TEM and SEM specimens and specimen holders.

The K1050X Plasma Etcher/Asher/Cleaner is a compact, bench-top system designed for research and development, and some small scale production applications.

Many of our instruments require the addition of a suitable two-stage rotary vacuum pump (vane pump), either as a primary pump or to ‘back’ built-in turbomolecular pumps.

We are pleased to offer the Pfeiffer DUO 6 two-stage pump, which has an excellent reputation for both reliability and performance, delivering high or low throughputs with high ultimate vacuum. In addition, their low mass and size, coupled with ultra-low noise and vibration levels makes the DUO 6 ideally suited to Quorum Technologies bench-top coaters, cryo-SEM preparation systems and other instruments.

For more information, please feel free to drop us an email at info@ellipsiz.com

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